A Piezoelectric Micropump Using Resonance Drive with High Power Density.
نویسندگان
چکیده
منابع مشابه
A Resonantly-Driven Piezoelectric Micropump for Microfactory
For realization of micro fluid power sources applicable to microfactory or micromachines using fluid power with high power density, a resonantly-driven piezoelectric micropump with newly devised check valve unit is developed and a practical application to micro press is attempted. First, a micro sheet valve having a floating valve-body inside valve chest to increase valve-opening and to decreas...
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
سال: 1999
ISSN: 0387-5024,1884-8354
DOI: 10.1299/kikaic.65.1071